All-Silicon Pressure Sensors Introduced

Originally Published MPMN October 2005

INDUSTRY NEWS

All-Silicon Pressure Sensors Introduced

Susan Shepard

A global provider of integrated circuits and microelectromechanical systems (MEMS) has introduced a new line of all-silicon pressure sensors. Apogee Technology Inc. (Norwood, MA; www.apogeeddx.com) believes its first MEMS products have size, cost, performance, and reliability advantages when compared with existing technologies.

The company uses a manufacturing approach and design methodology that reduces sensor size by a factor of four compared with most existing solutions. This simplified all-silicon approach may reduce cost and improve reliability by eliminating the need to use multiple components to create a pressure sensor.

The first Sensilica product is a 0–75-psi pressure sensor die. It is suitable for OEMs seeking low-cost, high-performance absolute pressure-sensing measurement in a small form. Engineering samples are available for immediate delivery. In addition, Apogee is planning to introduce six new pressure sensor products by the end of this year.

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