A high-speed, high-force voice coil stage is a self-contained, compact motion control component that can be mounted horizontally or vertically in a variety of micropositioning applications. The VCS-2020 is a cross-roller stage that provides submicron positioning resolution. Resolution capability is better than 300 nm. Its integrated analog position feedback sensor ensures 100-nm repeatability. The device features a travel of 20 mm (0.7874 in.) and a 20-mm-diameter aperture. Measuring 4.60 × 2.96 × 3.18 in., the low-mass component comprises a high-precision, low-inertia cross-roller stage, voice coil actuator, analog position sensor, servo amplifier, and servo controller. It is rated at 4 lb of continuous force and 16 lb of peak force for 10 seconds and is cleanroom compatible. Multiple sets of mounting holes facilitate integration into new and existing applications.
Equipment Solutions Inc.
Sunnyvale, CA, 408/245-7161